Workshop "Diagnostics of process plasmas"
Unternehmen
Workshop "Diagnostics of process plasmas"
02.12.2025 – 03.12.2025 | 02:00 - 00:00 | Region Dresden
Fraunhofer-Institut FEP | Winterbergstraße 28 | 01277 Dresden
Plasma technologies for surface modification and layer deposition are well established in industry and many products in semiconductor technology, the automotive industry, medical technology etc. would be inconceivable today without technological plasma processes. Specific process control is essential to ensure process reliability when using plasma technology.
Continuous further development of the relevant diagnostics is required to optimize and ultimately reduce the costs of manufacturing processes.
The workshop "Diagnostics of process plasmas: possibilities, limits and applications" is dedicated to this topic. The latest results of plasma diagnostics will be presented by renowned research institutes and the implementation by some industrial partners will be demonstrated. In addition to very specialized diagnostic procedures, relatively easy-to-use methods that are well suited for industrial applications will also be presented.
The workshop addresses:
- Developers and practitioners in plasma technology and plant engineering
- Physicists and technicians from basic research