Workshop "Diagnostics of process plasmas"

Name: Workshop "Diagnostics of process plasmas"
Start: 2025-12-02
End: 2025-12-03
Location: Fraunhofer-Institut FEP

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Workshop "Diagnostics of process plasmas"

02.12.2025 – 03.12.2025 | 00:00 - 00:00 | Region Dresden

Fraunhofer-Institut FEP | Winterbergstraße 28 | 01277 Dresden

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Plasma technologies for surface modification and layer deposition are industrially established and many products in semiconductor technology, the automotive industry, medical technology, etc. are no longer conceivable today without technological plasma processes.

Specific process control is essential to ensure process reliability when using plasma technology. Continuous further development of the relevant diagnostics is required to optimize and thus ultimately reduce the costs of production processes.

The workshop "Diagnostics of process plasmas: possibilities, limits and applications" is dedicated to this topic.

The latest results of plasma diagnostics will be presented by renowned research institutes and the implementation by some industrial partners will be demonstrated. In addition to very specialized diagnostic procedures, relatively simple methods that are well suited for industrial use will also be presented.

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